The combination of the latest semiconductor technology, extensive sensors and maximum ease of use provide the Series 5000 generators with excellent performance. Using integrated analog monitoring of the pressure in the plasma chamber, of current, voltage and frequency – along with the analysis of light emitted by the plasma – the highest level of process reliability is achieved.
The user-friendly touchscreen control panel for controlling the generator is designed clearly; signal-chaining to higher- and lower-ranking controls is integrated.
IST (International Surface Technology 1/2017)
WERKSTOFFE IN DER FERTIGUNG (Nr. 1/2017)
DICHT! (Nr. 4/2016)