Topic: Plasma treatment of silicon wafers. Nano-plasma cleaning, super-fine cleaning of wafers.

Nano-Plasma Cleaning of Silicon Wafers

Wafer manufacturing begins with a block of semiconductor material. This is sliced (sawed) into wafers, which are then polished in a chemical/mechanical process until the required surface roughness of a few nanometers is achieved.
Nanoreinigung eines WaferPolished and plasma treated wafer
In the next step, Openair® plasma is used as a highly efficient and simple procedure for super-fine cleaning of these nano-structures. One hundred percent of carbohydrates and particles are removed and error rates can be significantly reduced using this Openair® Plasma cleaning.

back to main topic Wafers/Chips

Canada
Plasmatreat North America Inc.
1480 Sandhill Dr., Unit 8,
Ancaster, ON L9G 4V5
Canada

Phone: +1 905 304-5200
Fax: +1 905 304-5260

Contact: Mr. Tim Smith
tim.smith@plasmatreat.com


USA
Plasmatreat USA, Inc
2541 Technology Drive, Suite 407
Elgin, IL 60124

Phone: +1 847-783-0622
Fax: +1 847-783-0991

Contact: Mr. Jeff Leighty
jeff.leighty@plasmatreat.com


Plasmatreat USA, Inc
4th State, Inc.
1260 Elmer Street
Belmont, CA 94002

Phone: +1 650 596 1606
Fax: +1 650 596 1180

Contact: Mr. Wally Hansen
wally.hansen@plasmatreat.com

 
 
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Plast Eurasia 2015 Logo
Plast Eurasia
26th International Istanbul Plastics Industry Fair

December 7 – 10, 2016
Hall 4, Booth 404B
Istanbul, Turkey

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